Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets (Запис № 446184)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 04436nam a22006375i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 978-3-319-66607-5 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | DE-He213 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20210118123627.0 |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr nn 008mamaa |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 171005s2017 gw | s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9783319666075 |
| -- | 978-3-319-66607-5 |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.1007/978-3-319-66607-5 |
| Source of number or code | doi |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | QC176.8.S8 |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | QC611.6.S9 |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | PHFC |
| Source | bicssc |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | SCI077000 |
| Source | bisacsh |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | PHFC |
| Source | thema |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 530.417 |
| Edition number | 23 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Pampillón Arce, María Ángela. |
| Relator term | author. |
| Relator code | aut |
| -- | http://id.loc.gov/vocabulary/relators/aut |
| 245 10 - TITLE STATEMENT | |
| Title | Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets |
| Medium | [electronic resource] / |
| Statement of responsibility, etc | by María Ángela Pampillón Arce. |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 1st ed. 2017. |
| 264 #1 - | |
| -- | Cham : |
| -- | Springer International Publishing : |
| -- | Imprint: Springer, |
| -- | 2017. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | XXIII, 164 p. 116 illus., 6 illus. in color. |
| Other physical details | online resource. |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 347 ## - | |
| -- | text file |
| -- | |
| -- | rda |
| 490 1# - SERIES STATEMENT | |
| Series statement | Springer Theses, Recognizing Outstanding Ph.D. Research, |
| Міжнародний стандартний серійний номер для назви серії (ISSN) | 2190-5053 |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | Introduction -- Fabrication Techniques -- Characterization Techniques -- Thermal Oxidation of Gd2o3 -- Plasma Oxidation of Gd2o3 and Sc2o3 -- Gadolinium Scandate -- Interface Scavenging -- Gd2o3 on Inp Substrates -- Conclusions and Future Work. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets. It demonstrates the possibility of depositing high permittivity materials (GdScO3) by means of high pressure sputtering from metallic targets using in situ plasma oxidation on Si and indium phosphate (InP) substrates. The advantage of this system is the high working pressure, which causes the particles to undergo multiple collisions and become thermalized before reaching the substrate in a pure diffusion process, thus protecting the semiconductor surface from damage. This work presents a unique fabrication using metallic targets and involving a two-step deposition process: a thin metallic film is sputtered in an Ar atmosphere and this film is then plasma oxidized in situ. It also demonstrates the fabrication of GdScO3 on Si with a permittivity value above 30 from metallic Gd and Sc targets. Since co-sputtering was not possible, a nanolaminate of these materials was deposited and annealed. The electrical properties of these devices show that the material is highly interesting from a microelectronic integration standpoint. |
| 506 ## - RESTRICTIONS ON ACCESS NOTE | |
| Terms governing access | Available to subscribing member institutions only. Доступно лише організаціям членам підписки. |
| 506 ## - RESTRICTIONS ON ACCESS NOTE | |
| Standardized terminology for access restriction | Online access from local network of NaUOA. |
| 506 ## - RESTRICTIONS ON ACCESS NOTE | |
| Standardized terminology for access restriction | Online access with authorization at https://link.springer.com/ |
| 506 ## - RESTRICTIONS ON ACCESS NOTE | |
| Standardized terminology for access restriction | Онлайн-доступ з локальної мережі НаУОА. |
| 506 ## - RESTRICTIONS ON ACCESS NOTE | |
| Standardized terminology for access restriction | Онлайн доступ з авторизацією на https://link.springer.com/ |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Surfaces (Physics). |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Interfaces (Physical sciences). |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Thin films. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Nanotechnology. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Electronic circuits. |
| 650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Surface and Interface Science, Thin Films. |
| -- | http://scigraph.springernature.com/things/product-market-codes/P25160 |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Nanotechnology. |
| -- | http://scigraph.springernature.com/things/product-market-codes/Z14000 |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Electronic Circuits and Devices. |
| -- | http://scigraph.springernature.com/things/product-market-codes/P31010 |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Nanotechnology and Microengineering. |
| -- | http://scigraph.springernature.com/things/product-market-codes/T18000 |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | SpringerLink (Online service) |
| 773 0# - HOST ITEM ENTRY | |
| Title | Springer eBooks |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
| Display text | Printed edition: |
| International Standard Book Number | 9783319666068 |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
| Display text | Printed edition: |
| International Standard Book Number | 9783319666082 |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
| Display text | Printed edition: |
| International Standard Book Number | 9783319882840 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| Uniform title | Springer Theses, Recognizing Outstanding Ph.D. Research, |
| -- | 2190-5053 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://doi.org/10.1007/978-3-319-66607-5">https://doi.org/10.1007/978-3-319-66607-5</a> |
| 912 ## - | |
| -- | ZDB-2-PHA |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | ЕКнига |
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