TY  - SER
AU  - Fang,Fengzhou
AU  - Gao,Wei
AU  - He,Jingjing
ED  - SpringerLink (Online service)
TI  - Nanomanufacturing and Metrology
SN  - 2520-8128
CY  - Singapore
PB  - Springer Nature Singapore, Imprint: Springer.
KW  - Microtechnology
KW  - Microelectromechanical systems
KW  - Nanotechnology
KW  - Manufactures
KW  - Microsystems and MEMS
KW  - Machines, Tools, Processes
N2  - Nanomanufacturing and Metrology is a peer-reviewed, international and interdisciplinary research journal and is the first journal over the world that provides a principal forum for nano-manufacturing and nano-metrology. Nanomanufacturing and Metrology publish in the form of original articles, cutting-edge communications, timely review papers, technical reports, and case studies. Special issues devoted to developments in important topics in nano-manufacturing and metrology will be published periodically. Nanomanufacturing and Metrology publishes articles that focus on, but are not limited to, the following areas: Nano-manufacturing and metrology Atomic manufacturing and metrology Micro-manufacturing and metrology Physics, chemistry, and materials in micro-manufacturing, nano-manufacturing, and atomic manufacturing Tools and processes for micro-manufacturing, nano-manufacturing and atomic manufacturing
UR  - http://link.springer.com/journal/41871
ER  -